Details for 2015179672

Up to date per 03.04.2026

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Title / Product Name

BELICHTUNGSVORRICHTUNG, BELICHTUNGSVERFAHREN UND VERFAHREN ZUR HERSTELLUNG EINER VORRICHTUNG

Status

Deleted

Protection Type

European Patent

(AT-) Application Number

2015179672

EP Publication Number

2980834

E-Number

837179

Language

PCT Number

Publication Date

03.02.2016 A

12.10.2016 B1

Registration Date

12.10.2016

AT Publication Date

15.10.2016

Application Date

27.01.2005

Registration Number

Priorities

02.02.2004

2004025837

14.10.2004

2004300566

IPC

H01L 21/027 20060101AFI20160531BHEP

Maximum Duration of Protection

27.01.2025

Owner

Nikon Corporation15-3, Konan 2-chome Minato-ku Tokyo 108-6290JP

Representative

No representatives present

Inventor

Shibazaki, Yuichic/o NIKON CORPORATION 2-3, Marunouchi 3-chome Chiyoda-ku Tokyo 100-8331JP