Details for 2015185639

Up to date per 04.04.2026

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Title / Product Name

BELICHTUNGSVORRICHTUNG, BELICHTUNGSVERFAHREN UND VORRICHTUNGSHERSTELLUNGSVERFAHREN

Status

Deleted

Protection Type

European Patent

(AT-) Application Number

2015185639

EP Publication Number

2998982

E-Number

917679

Language

PCT Number

Publication Date

23.03.2016 A

09.08.2017 B1

Registration Date

09.08.2017

AT Publication Date

15.08.2017

Application Date

27.01.2005

Registration Number

Priorities

02.02.2004

2004025837

14.10.2004

2004300566

IPC

H01L 21/027 20060101AFI20170331BHEP

Maximum Duration of Protection

27.01.2025

Owner

Nikon Corporation15-3, Konan 2-chome Minato-ku Tokyo 108-6290JP

Representative

No representatives present

Inventor

Shibazaki, Yuichic/o NIKON CORPORATION 2-3, Marunouchi 3-chome Chiyoda-ku Tokyo, 100-8331JP