Details for 2014881475
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Details for 2014881475
Deleted
European Patent
14.12.2016 A
03.02.2021 B1
07.02.2014
JP
2014022508
H01L 21/673 20060101AFI20170816BHEP
Owner
Murata Machinery, Ltd.3, Minami Ochiai-cho Kisshoin Minami-ku Kyoto-shi, Kyoto 601-8326JP
Representative
No representatives present
Inventor
MURATA Masanaoc/o Murata Machinery Ltd. Ise Plant 100 Takegahana-cho Ise-shi Mie 516-0005JP
YAMAJI Takashic/o Murata Machinery Ltd. Ise Plant 100 Takegahana-cho Ise-shi Mie 516-0005JP