Details for 2016762616

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Title / Product Name

VERFAHREN ZUR NEUTRALSTRAHLVERARBEITUNG AUF BASIS VON GASCLUSTER-IONENSTRAHLTECHNOLOGIE

Status

Deleted

Protection Type

European Patent

(AT-) Application Number

2016762616

EP Publication Number

3268505

E-Number

1490026

Language

PCT Number

US16022058

Publication Date

17.01.2018 A

04.05.2022 B1

Registration Date

04.05.2022

AT Publication Date

15.05.2022

Application Date

11.03.2016

Registration Number

Priorities

11.03.2015

201562131669 P

IPC

H01L 21/033 20060101AFI20181005BHEP

Maximum Duration of Protection

11.03.2036

Owner

Exogenesis Corporation20 Fortune Drive Billerica, Massachusetts 01821US

Representative

No representatives present

Inventor

KIRKPATRICK, Sean, R.c/o Exogenesis Corporation 20 Fortune Drive Billerica, Massachusetts 01821US

SVRLUGA, Richard, C.c/o Exogenesis Corporation 20 Fortune Drive Billerica, Massachusetts 01821US