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see.ip - Details for LITHOGRAFISCHE VORRICHTUNG UND VERFAHREN ZUM BETRIEB EINER LITHOGRAFISCHEN VORRICHTUNG
Details for 2016787344
Up to date per 16.06.2026
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Details for 2016787344
Title / Product Name
LITHOGRAFISCHE VORRICHTUNG UND VERFAHREN ZUM BETRIEB EINER LITHOGRAFISCHEN VORRICHTUNG
Status
Deleted
Protection Type
European Patent
(AT-) Application Number
2016787344
EP Publication Number
3377942
E-Number
1642975
Language
EN
PCT Number
EP16073380
Publication Date
26.09.2018 A
20.12.2023 B1
Registration Date
20.12.2023
AT Publication Date
15.01.2024
Application Date
30.09.2016
Registration Number
-
Priorities
20.11.2015
EP
15195532
24.02.2016
EP
16157155
IPC
G03F 7/20 20060101AFI20170607BHEP
Maximum Duration of Protection
30.09.2036
Owner
ASML Netherlands B.V.
P.O. Box 324
5500 AH Veldhoven
NL
Representative
No representatives present
Inventor
KANEHARA, Junichi
P.O. Box 324
5500 AH Veldhoven
NL
BUTLER, Hans
P.O. Box 324
5500 AH Veldhoven
NL
DE WIT, Paul Corné Henri
P.O. Box 324
5500 AH Veldhoven
NL
VAN DER PASCH, Engelbertus Antonius Fransiscus
P.O. Box 324
5500 AH Veldhoven
NL