Details for 2017835182

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Title / Product Name

ZUSAMMENSETZUNGEN UND VERFAHREN MIT VERWENDUNG DAVON FÜR KOHLENSTOFFDOTIERTE SILICIUMHALTIGE FILME

Status

Deleted

Protection Type

European Patent

(AT-) Application Number

2017835182

EP Publication Number

3491167

E-Number

1609693

Language

PCT Number

US17043890

Publication Date

05.06.2019 A

06.09.2023 B1

Registration Date

06.09.2023

AT Publication Date

15.09.2023

Application Date

26.07.2017

Registration Number

Priorities

27.07.2016

201662367260 P

19.07.2017

201715654426

IPC

H01L 21/02 20060101AFI20191127BHEP

Maximum Duration of Protection

26.07.2037

Owner

Versum Materials US, LLC8555 S. River Parkway Tempe, AZ 85284US

Representative

No representatives present

Inventor

CHANDRA, Haripin1702 Thorley Way San Marcos CA 92078US

LEI, Xinjian1928 Cherrywood Street Vista CA 92081US

MALLIKARJUNAN, Anupama1640 Windemere Drive San Marcos CA 92078US

KIM, Moo-Sung119 Booljung-Ro Apartment 805-1404 Boondang-Gu Sungnam Gyunggi-Do 13602KR