Details for 2019161776
Up to date per 03.04.2026
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Details for 2019161776
Deleted
European Patent
11.09.2019 A
02.08.2023 B1
27.02.2019
US
201916286808
H01L 21/311 20060101AFI20190701BHEP
Owner
Versum Materials US, LLC8555 S. River Parkway Tempe, AZ 85284US
Representative
No representatives present
Inventor
CAO, Yuanmei13869 Ninebark Ct. Carmel, IN 46033US
PHENIS, Michael T.16 Lick Creek Drive Markleville, IN 46056US
DALTON, Richard Peters14902 Warner Trail Westfield, IN 46074US