Details for 2010186134

Up to date per 01.04.2026

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Title / Product Name

Belichtungsvorrichtung, Belichtungsverfahren und Bauelementsherstellungsverfahren

Status

Deleted

Protection Type

European Patent

(AT-) Application Number

2010186134

EP Publication Number

2267759

E-Number

698625

Language

PCT Number

Publication Date

29.12.2010 A

26.11.2014 B1

Registration Date

26.11.2014

AT Publication Date

15.12.2014

Application Date

27.01.2005

Registration Number

Priorities

02.02.2004

2004025837

14.10.2004

2004300566

IPC

H01L 21/027 20060101AFI20120926BHEP

Maximum Duration of Protection

27.01.2025

Owner

Nikon Corporation12-1, Yurakucho 1-chome Chiyoda-ku Tokyo 100-8331JP

Representative

No representatives present

Inventor

Shibazaki, Yuichic/o NIKON CORPORATION 2-3, Marunouchi 3-chome Chiyoda-ku Tokyo 100-8331JP