Details for 2010186153
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Details for 2010186153
Deleted
European Patent
16.02.2011 A
20.04.2016 B1
02.02.2004
JP
2004025837
14.10.2004
JP
2004300566
H01L 21/027 20060101AFI20121001BHEP
Owner
Nikon Corporation15-3, Konan 2-chome Minato-ku Tokyo 108-6290JP
Representative
No representatives present
Inventor
Shibazaki, Yuichic/o NIKON CORPORATION 2-3, Marunouchi 3-chome Chiyoda-ku Tokyo 100-8331JP