Details for 2011179985

Up to date per 03.04.2026

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Title / Product Name

Wässrige Polierzusammensetzung und Verfahren zum chemisch-mechanischen Polieren von Substraten mit dielektrischen Siliciumoxid- und Polysiliciumfilmen

Status

Deleted

Protection Type

European Patent

(AT-) Application Number

2011179985

EP Publication Number

2428541

E-Number

1104511

Language

PCT Number

Publication Date

14.03.2012 A

06.03.2019 B1

Registration Date

06.03.2019

AT Publication Date

15.03.2019

Application Date

05.09.2011

Registration Number

Priorities

08.09.2010

380719 P

IPC

C09K 3/14 20060101AFI20161018BHEP

Maximum Duration of Protection

05.09.2031

Owner

BASF SECarl-Bosch-Strasse 38 67056 Ludwigshafen am RheinDE

Representative

No representatives present

Inventor

Li, YuzhuoWieblinger Weg 33/4 69123 HeidelbergDE

Chu, Jea-Ju2F, No. 5, Alley 36. Lane 258, Sec 6 Yangping N.R Shilin District, Taipei City 111TW

Venkataraman, Shyam SundarYuanhua Road Zhongli City Taoyuan County 320TW

Chiu, Wei Lan William9F-11, No.55, Loyang Sreet Taipei CityTW

Pinder, Harvey Wayne5766 N. Lincoln Avenue 301 Chicago, IL 60659US