Details for 2014836059

Up to date per 02.04.2026

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Title / Product Name

VERFAHREN UND VORRICHTUNG ZUR FOKUSBESTIMMUNG

Status

Deleted

Protection Type

European Patent

(AT-) Application Number

2014836059

EP Publication Number

3033764

E-Number

1436950

Language

PCT Number

US14050390

Publication Date

22.06.2016 A

06.10.2021 B1

Registration Date

06.10.2021

AT Publication Date

15.10.2021

Application Date

08.08.2014

Registration Number

Priorities

10.08.2013

201361864527 P

04.08.2014

201414451320

IPC

H01L 21/027 20060101AFI20170216BHEP

Maximum Duration of Protection

08.08.2034

Owner

KLA - Tencor CorporationOne Technology Drive Milpitas, California 95035US

Representative

No representatives present

Inventor

PANDEV, Stillian Ivanov2452 Rebecca Lynn Way Santa Clara, California 95050US