Details for 2016793208

Up to date per 04.04.2026

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Title / Product Name

SYSTEME UND VERFAHREN ZUM SCANNING MIT SCHRÄGEM EINFALL MIT 2D-ANORDNUNG VON PUNKTEN

Status

Deleted

Protection Type

European Patent

(AT-) Application Number

2016793208

EP Publication Number

3295477

E-Number

1455859

Language

PCT Number

US16030838

Publication Date

21.03.2018 A

15.12.2021 B1

Registration Date

15.12.2021

AT Publication Date

15.01.2022

Application Date

04.05.2016

Registration Number

Priorities

08.05.2015

201562159173 P

29.12.2015

201514982747

IPC

G01N 21/956 20060101AFI20210616BHEP

Maximum Duration of Protection

04.05.2036

Owner

KLA - Tencor CorporationOne Technology Drive Milpitas, California 95035US

Representative

No representatives present

Inventor

SULLIVAN, Jamie3110 McNaull Drive Eugene, Oregon 97405US

CHURIN, Yevgeniy3126 Terrywood Court San Jose, California 95132US