Details for 2016815855

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Title / Product Name

NEGATIV ARBEITENDE PHOTORESISTZUSAMMENSETZUNGEN ZUR LASERABLATION UND VERFAHREN ZU DEREN VERWENDUNG

Status

Deleted

Protection Type

European Patent

(AT-) Application Number

2016815855

EP Publication Number

3394674

E-Number

1267745

Language

PCT Number

EP16081903

Publication Date

31.10.2018 A

06.05.2020 B1

Registration Date

06.05.2020

AT Publication Date

15.05.2020

Application Date

20.12.2016

Registration Number

Priorities

21.12.2015

201514976498

IPC

G03F 7/038 20060101AFI20170724BHEP

Maximum Duration of Protection

20.12.2036

Owner

AZ Electronic Materials Luxembourg S.à.r.l.46 Place Guillaume II 1648 LuxembourgLU

Representative

No representatives present

Inventor

CHEN, Chunweic/o EMD Performance Materials Corp. 70 Meister Avenue Somerville, NJ 08876US

LIU, Weihongc/o EMD Performance Materials Corp. 70 Meister Avenue Somerville, NJ 08876US

LU, PingHungc/o EMD Performance Materials Corp. 70 Meister Avenue Somerville, NJ 08876US