Details for 2016898139

Up to date per 04.04.2026

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Title / Product Name

VERBESSERUNG DER PROZESSKOMPATIBILITÄT DURCH FÜLLFAKTORMODULATION

Status

Deleted

Protection Type

European Patent

(AT-) Application Number

2016898139

EP Publication Number

3440511

E-Number

1664129

Language

PCT Number

US16060626

Publication Date

13.02.2019 A

06.03.2024 B1

Registration Date

06.03.2024

AT Publication Date

15.03.2024

Application Date

04.11.2016

Registration Number

Priorities

04.04.2016

201662318086 P

IPC

G03F 7/20 20060101AFI20191108BHEP

Maximum Duration of Protection

04.11.2036

Owner

KLA-Tencor CorporationOne Technology Drive Milpitas, California 95035US

Representative

No representatives present

Inventor

LEVINSKI, VladimirHermon 9 23100 Migdal HaEmekIL

HAJAJ, Eitan46A/5 Shalom Aleichem Street 61000 Tel AvivIL

ITZKOVICH, TalKfar Uriya 10 99735 Kfar UriyaIL

AHARON, SharonYuval 40 1796000 HanatonIL

ADEL, Michael E.14 Yigal Alon Street 30900 Ya'akov ZichronIL

PASKOVER, YuriC/O KLA-Tencor Corporation One Technology Drive Milipitas, CA 95035US

NEGRI, DariaC/O KLA-Tencor Corporation One Technology Drive Milipitas, CA 95035DE

LUBASHEVSKY, YuvalC/O KLA-Tencor Corporation One Technology Drive Milipitas, CA 95035DE

MANASSEN, AmnonC/O KLA-Tencor Corporation One Technology Drive Milipitas, CA 95035DE

LEE, MyungjunC/O KLA-Tencor Corporation One Technology Drive Milipitas, CA 95035DE

SMITH, Mark DC/O KLA-Tencor Corporation One Technology Drive Milipitas, CA 95035DE