Details for 2019206672

Up to date per 04.04.2026

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Title / Product Name

UNTERDRÜCKUNG DER SIN-ENTFERNUNGSRATEN UND REDUZIERUNG DES OXID-TRENCH-DISHING FÜR PROZESS DER FLACHGRABENISOLATION (STI)

Status

Deleted

Protection Type

European Patent

(AT-) Application Number

2019206672

EP Publication Number

3647384

E-Number

1694240

Language

PCT Number

Publication Date

06.05.2020 A

12.06.2024 B1

Registration Date

12.06.2024

AT Publication Date

15.07.2024

Application Date

31.10.2019

Registration Number

Priorities

31.10.2018

201862753431 P

27.10.2019

201916664924

IPC

C09G 1/02 20060101AFI20231026BHEP

Maximum Duration of Protection

31.10.2039

Owner

Versum Materials US, LLC8555 S. River Parkway Tempe, AZ 85284US

Representative

No representatives present

Inventor

SHI, Xiaobo8555 S. River Parkway Tempe, Arizona 85284US

MURELLA, Krishna P.8555 S. River Parkway Tempe, Arizona 85284US

ROSE, Joseph D8555 S. River Parkway Tempe, Arizona 85284US

ZHOU, Hongjun8555 S. River Parkway Tempe, Arizona 85284US

O'NEILL, Mark Leonard8555 S. River Parkway Tempe, Arizona 85284US