Details for 2022150145

Up to date per 01.04.2026

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Title / Product Name

MESSGERÄT, LITHOGRAPHIEGERÄT UND VERFAHREN ZUR HERSTELLUNG EINES ARTIKELS

Status

Deleted

Protection Type

European Patent

(AT-) Application Number

2022150145

EP Publication Number

4036647

E-Number

1630164

Language

PCT Number

Publication Date

03.08.2022 A

08.11.2023 B1

Registration Date

08.11.2023

AT Publication Date

15.11.2023

Application Date

04.01.2022

Registration Number

Priorities

29.01.2021

2021013597

IPC

G03F 7/20 20060101AFI20220628BHEP

Maximum Duration of Protection

04.01.2042

Owner

CANON KABUSHIKI KAISHA30-2 SHIMOMARUKO 3-CHOME OHTA-KU Tokyo 146-8501JP

Representative

No representatives present

Inventor

YAMAGUCHI, Wataru Ohta-ku, Tokyo, 146-8501JP