Details for 2021167990

Up to date per 01.04.2026

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Title / Product Name

VERFAHREN ZUM HERSTELLEN VON HALBLEITERSCHEIBEN MIT AUS DER GASPHASE ABGESCHIEDENER EPITAKTISCHER SCHICHT IN EINER ABSCHEIDEKAMMER

Status

Granted/Registered

Protection Type

European Patent

(AT-) Application Number

2021167990

EP Publication Number

4075488

E-Number

1662048

Language

PCT Number

Publication Date

19.10.2022 A

28.02.2024 B1

Registration Date

28.02.2024

AT Publication Date

15.03.2024

Application Date

13.04.2021

Registration Number

Priorities

IPC

H01L 21/68 20060101AFI20211013BHEP

Maximum Duration of Protection

13.04.2041

Owner

Siltronic AGEinsteinstraße 172 Tower B / Blue Tower 81677 MünchenDE

Representative

No representatives present

Inventor

Stettner, Thomas 83329 Waging am SeeDE

Information about Fees