Details for 2020740561
Up to date per 22.04.2026
Actions
Details for 2020740561
Deleted
European Patent
18.05.2022 A
30.08.2023 B1
11.07.2019
US
201962872950 P
G03F 7/42 20060101AFI20210118BHEP
Owner
Merck Patent GmbHFrankfurter Strasse 250 64293 DarmstadtDE
Representative
No representatives present
Inventor
WU, Hengpengc/o EMD Performance Materials Corp. 70 Meister Avenue Branchburg, New Jersey 08876US
ARENT, Robertc/o EMD Performance Materials Corp. 70 Meister Avenue Branchburg, New Jersey 08876US