Details for 2016787344

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Title / Product Name

LITHOGRAFISCHE VORRICHTUNG UND VERFAHREN ZUM BETRIEB EINER LITHOGRAFISCHEN VORRICHTUNG

Status

Deleted

Protection Type

European Patent

(AT-) Application Number

2016787344

EP Publication Number

3377942

E-Number

1642975

Language

PCT Number

EP16073380

Publication Date

26.09.2018 A

20.12.2023 B1

Registration Date

20.12.2023

AT Publication Date

15.01.2024

Application Date

30.09.2016

Registration Number

Priorities

20.11.2015

15195532

24.02.2016

16157155

IPC

G03F 7/20 20060101AFI20170607BHEP

Maximum Duration of Protection

30.09.2036

Owner

ASML Netherlands B.V.P.O. Box 324 5500 AH VeldhovenNL

Representative

No representatives present

Inventor

KANEHARA, JunichiP.O. Box 324 5500 AH VeldhovenNL

BUTLER, HansP.O. Box 324 5500 AH VeldhovenNL

DE WIT, Paul Corné HenriP.O. Box 324 5500 AH VeldhovenNL

VAN DER PASCH, Engelbertus Antonius FransiscusP.O. Box 324 5500 AH VeldhovenNL