Details for 2017744929

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Title / Product Name

VORRICHTUNG MIT MEHREREN GELADENEN TEILCHENSTRAHLEN

Status

Deleted

Protection Type

European Patent

(AT-) Application Number

2017744929

EP Publication Number

3408829

E-Number

1625142

Language

PCT Number

US17015223

Publication Date

05.12.2018 A

25.10.2023 B1

Registration Date

25.10.2023

AT Publication Date

15.11.2023

Application Date

27.01.2017

Registration Number

Priorities

27.01.2016

201662287626 P

IPC

G01N 23/2251 20180101AFI20190916BHEP

Maximum Duration of Protection

27.01.2037

Owner

ASML Netherlands B.V.De Run 6501 5504 DR VeldhovenNL

Representative

No representatives present

Inventor

REN, Weiming2069 Kiwi Walkway San Jose, CA 95133US

LIU, Xuedong5458 Ora Street San Jose, CA 95129US

HU, Xuerang1363 Damby Avenue San Jose, CA 95132US

CHEN, Zhongwei1561 Blaney Avenue San Jose, CA 95129US