Details for 2019168714
Up to date per 23.04.2026
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Details for 2019168714
Deleted
European Patent
16.10.2019 A
09.03.2022 B1
12.04.2018
US
201862656843 P
26.03.2019
US
201916365506
H01L 21/311 20060101AFI20190815BHEP
Owner
Versum Materials US, LLC8555 S. River Parkway Tempe, AZ 85284US
Representative
No representatives present
Inventor
Peters, Richard Dalton8555 South River Parkway Tempe, AZ 85284-2601US
Cao, Yuanmei8555 South River Parkway Tempe, AZ 85284-2601US