Details for 2016841269
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Details for 2016841269
Deleted
European Patent
04.07.2018 A
20.04.2022 B1
28.08.2015
JP
2015168594
H01L 21/673 20060101AFI20190328BHEP
Owner
Murata Machinery, Ltd.3 Minami Ochiai-cho Kisshoin Minami-ku Kyoto-shi, Kyoto 601-8326JP
Representative
No representatives present
Inventor
MURATA, Masanaoc/o Murata Machinery Ltd. Ise Plant 100 Takegahana-cho Ise-shi Mie 516-0005JP
TOMINAGA, Tadamasac/o Murata Machinery Ltd. Inuyama Plant 2 Aza-Nakajima Oaza-Hashizume Inuyama-shi Aichi 484-8502JP