Details for 2019902588

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Title / Product Name

SUBSTRATANALYSEVERFAHREN UND SUBSTRATANALYSEVORRICHTUNG

Status

Deleted

Protection Type

European Patent

(AT-) Application Number

2019902588

EP Publication Number

3890002

E-Number

1652870

Language

PCT Number

JP19043353

Publication Date

06.10.2021 A

24.01.2024 B1

Registration Date

24.01.2024

AT Publication Date

15.02.2024

Application Date

06.11.2019

Registration Number

Priorities

26.12.2018

2018242929

IPC

H01L 21/66 20060101AFI20230530BHEP

Maximum Duration of Protection

06.11.2039

Owner

Ias Inc.2-1, Hinohommachi 2-chome Hino-shi, Tokyo 191-0011JP

Representative

No representatives present

Inventor

KAWABATA, Katsuhiko Hino-shi, Tokyo 191-0011JP

LEE, Sungjae Hino-shi, Tokyo 191-0011JP

HAYASHI, Takuma Hino-shi, Tokyo 191-0011JP