Details for 2017717106

Up to date per 02.04.2026

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Title / Product Name

ENERGIEFILTERELEMENT FÜR IONENIMPLANTATIONSANLAGEN FÜR DEN EINSATZ IN DER PRODUKTION VON WAFERN

Status

Granted/Registered

Protection Type

European Patent

(AT-) Application Number

2017717106

EP Publication Number

3440690

E-Number

1420253

Language

PCT Number

EP17058018

Publication Date

13.02.2019 A

11.08.2021 B1

Registration Date

11.08.2021

AT Publication Date

15.09.2021

Application Date

04.04.2017

Registration Number

Priorities

04.04.2016

102016106119

IPC

H01J 37/317 20060101AFI20171013BHEP

Maximum Duration of Protection

04.04.2037

Owner

mi2-factory GmbHMoritz-von-Rohr-Str. 1a 07745 JenaDE

Representative

No representatives present

Inventor

KRIPPENDORF, FlorianNeugasse 6 07743 JenaDE

CSATO, ConstantinGrundlitz 12 95236 StammbachDE

Information about Fees