Details for 2019158497

Up to date per 03.04.2026

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Title / Product Name

NEGATIV ARBEITENDE PHOTORESISTZUSAMMENSETZUNGEN ZUR LASERABLATION UND METHODE UNTER DEREN VERWENDUNG

Status

Deleted

Protection Type

European Patent

(AT-) Application Number

2019158497

EP Publication Number

3511774

E-Number

1442321

Language

PCT Number

Publication Date

17.07.2019 A

27.10.2021 B1

Registration Date

27.10.2021

AT Publication Date

15.11.2021

Application Date

20.12.2016

Registration Number

Priorities

21.12.2015

201514976498

IPC

G03F 7/038 20060101AFI20190409BHEP

Maximum Duration of Protection

20.12.2036

Owner

Merck Patent GmbHFrankfurter Strasse 250 64293 DarmstadtDE

Representative

No representatives present

Inventor

Chen, Chunweic/o EMD Performance Materials Corp. 70 Meister Avenue Branchburg, NJ 08876US

Liu, Weihongc/o EMD Performance Materials Corp. 70 Meister Avenue Branchburg, NJ 08876US

Lu, PingHungc/o EMD Performance Materials Corp. 70 Meister Avenue Branchburg, NJ 08876US