Details for 2018831823

Up to date per 03.04.2026

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Title / Product Name

GASZUFUHRSYSTEM FÜR HOCHDRUCKPROZESSKAMMER

Status

Deleted

Protection Type

European Patent

(AT-) Application Number

2018831823

EP Publication Number

3652778

E-Number

1598524

Language

PCT Number

US18037539

Publication Date

20.05.2020 A

09.08.2023 B1

Registration Date

09.08.2023

AT Publication Date

15.08.2023

Application Date

14.06.2018

Registration Number

Priorities

14.07.2017

201762532715 P

07.12.2017

201715835378

IPC

H01L 21/67 20060101AFI20210315BHEP

Maximum Duration of Protection

14.06.2038

Owner

Micromaterials LLC2711 Centerville Road Suite 400 Wilmington, Delaware 19808US

Representative

No representatives present

Inventor

KHAN, Adib4473 Lafayette Street Santa Clara California 95054US

LIANG, Qiwei37800 Freesia Court Fremont California 94536US

MALIK, Sultan220 Bewicks Circle Sacramento California 95834US

WONG, Keith Tatseun221 Beethoven Lane Los Gatos California 95032US

NEMANI, Srinivas D.504 Fern Ridge Court Sunnyvale California 94087US