Details for 2015201534

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Title / Product Name

VERFAHREN ZUR TEMPORÄREN WAFERBINDUNG UND DÜNNSCHICHTWAFERHERSTELLUNGSVERFAHREN

Status

Deleted

Protection Type

European Patent

(AT-) Application Number

2015201534

EP Publication Number

3038148

E-Number

915335

Language

PCT Number

Publication Date

29.06.2016 A

02.08.2017 B1

Registration Date

02.08.2017

AT Publication Date

15.08.2017

Application Date

21.12.2015

Registration Number

Priorities

24.12.2014

2014259813

IPC

H01L 21/683 20060101AFI20170215BHEP

Maximum Duration of Protection

21.12.2035

Owner

Shin-Etsu Chemical Co., Ltd.6-1, Ohtemachi 2-chome Chiyoda-ku TokyoJP

Representative

No representatives present

Inventor

YASUDA, HiroyukiShin-Etsu Chemical Co., Ltd., c/o Silicone-Electronics Materials Research Center 1-10, Hitomi, Matsuida-machi Annaka-shi, GunmaJP

SUGO, MichihiroShin-Etsu Chemical Co., Ltd., c/o Silicone-Electronics Materials Research Center 1-10, Hitomi, Matsuida-machi Annaka-shi, GunmaJP

TAGAMI, ShoheiShin-Etsu Chemical Co., Ltd., c/o Silicone-Electronics Materials Research Center 1-10, Hitomi, Matsuida-machi Annaka-shi, GunmaJP

TANABE, MasahitoShin-Etsu Chemical Co., Ltd., c/o Silicone-Electronics Materials Research Center 1-10, Hitomi, Matsuida-machi Annaka-shi, GunmaJP