Details for 2004821787

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Title / Product Name

VERFAHREN ZUR HERSTELLUNG ISOLIERTER MIKRO- UND NANOSTRUKTUREN UNTER VERWENDUNG VON SOFT- ODER DRUCK-LITHOGRAPHIE

Status

Deleted

Protection Type

European Patent

(AT-) Application Number

2004821787

EP Publication Number

1704585

E-Number

876350

Language

PCT Number

US04042706

Publication Date

27.09.2006 A

15.03.2017 B1

Registration Date

15.03.2017

AT Publication Date

15.04.2017

Application Date

20.12.2004

Registration Number

Priorities

19.12.2003

531531 P

25.06.2004

583170 P

27.08.2004

604970 P

IPC

H01L 21/302 20060101AFI20070510BHEP

Maximum Duration of Protection

20.12.2024

Owner

THE UNIVERSITY OF NORTH CAROLINA AT CHAPEL HILL308 Bynum Hall, Campus Box 4105 Chapel Hill, NC 27599-4105US

Representative

No representatives present

Inventor

DESIMONE, Joseph, M.7315 Crescent Ridge Drive Chapel Hill, NC 27516US

ROLLAND, Jason, P.102 Hollow Oak Drive Durham, NC 27713US

EXNER, Ansley, E.1300 Warren Hites Drive-Apt.C107 Augusta, Georgia 30901US

SAMULSKI, Edward, T.413 Deming Road Chapel Hill, NC 27514US

SAMULSKI, R., Jude102 Darlin Circle Chapel Hill, NC 27514US

MAYNOR, Benjamin, W.2723 University Drive Durham, NC 27707US

EULISS, Larken, E.8104 Spring Meadow Drive Chapel Hill, NC 27517US

DENISON, Ginger, M.5 Meetinghouse Lane Durham, NC 27707US