Details for 2021158423
Up to date per 01.04.2026
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Details for 2021158423
Deleted
European Patent
11.08.2021 A
15.02.2023 B1
14.08.2013
US
201361866006 P
C23C 14/34 19850101AFI20210701BHEP
Owner
Applied Materials, Inc.3050 Bowers Avenue Santa Clara, CA 95054US
Representative
No representatives present
Inventor
West, Brian T.4780 Grimsby Drive San Jose, CA California 95130US
Cox, Michael S.7090 Church St. Gilroy, CA California 95020US
Oh, Jeonghoon18372 Purdue Drive Saratoga, CA California 95070US