Details for 2014196008

Up to date per 02.04.2026

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Title / Product Name

Fotomaskenrohling

Status

Deleted

Protection Type

European Patent

(AT-) Application Number

2014196008

EP Publication Number

2881790

E-Number

1146272

Language

PCT Number

Publication Date

10.06.2015 A

19.06.2019 B1

Registration Date

19.06.2019

AT Publication Date

15.07.2019

Application Date

03.12.2014

Registration Number

Priorities

06.12.2013

2013253239

IPC

G03F 1/00 20120101AFI20181218BHEP

Maximum Duration of Protection

03.12.2034

Owner

Shin-Etsu Chemical Co., Ltd.6-1, Ohtemachi 2-chome Chiyoda-ku TokyoJP

Representative

No representatives present

Inventor

Sasamoto, Kouheic/o New Functional Materials Research Center, Shin-Etsu Chemical Co., Ltd. 28-1, Nishi Fukushima, Kubiki-ku Joetsu-shi, NiigataJP

Inazuki, Yukioc/o New Functional Materials Research Center, Shin-Etsu Chemical Co., Ltd. 28-1, Nishi Fukushima, Kubiki-ku Joetsu-shi, NiigataJP

Fukaya, Souichic/o New Functional Materials Research Center, Shin-Etsu Chemical Co., Ltd. 28-1, Nishi Fukushima, Kubiki-ku Joetsu-shi, NiigataJP

Nakagawa, Hideoc/o New Functional Materials Research Center, Shin-Etsu Chemical Co., Ltd. 28-1, Nishi Fukushima, Kubiki-ku Joetsu-shi, NiigataJP

Kaneko, Hideoc/o New Functional Materials Research Center, Shin-Etsu Chemical Co., Ltd. 28-1, Nishi Fukushima, Kubiki-ku Joetsu-shi, NiigataJP