Skip to main content
EN
Caution:
At present, there are occasional discrepancies in the display of intellectual property rights holders and their representatives. We are working on a solution.
Patent Search
Details
see.ip - Details for VERFAHREN ZUR NEUTRALSTRAHLVERARBEITUNG AUF BASIS VON GASCLUSTER-IONENSTRAHLTECHNOLOGIE
Details for 2016762616
Up to date per 17.06.2026
Actions
Copy link to European Patent
Download Registration Print
Details
Details for 2016762616
Title / Product Name
VERFAHREN ZUR NEUTRALSTRAHLVERARBEITUNG AUF BASIS VON GASCLUSTER-IONENSTRAHLTECHNOLOGIE
Status
Deleted
Protection Type
European Patent
(AT-) Application Number
2016762616
EP Publication Number
3268505
E-Number
1490026
Language
EN
PCT Number
US16022058
Publication Date
17.01.2018 A
04.05.2022 B1
Registration Date
04.05.2022
AT Publication Date
15.05.2022
Application Date
11.03.2016
Registration Number
-
Priorities
11.03.2015
US
201562131669 P
IPC
H01L 21/033 20060101AFI20181005BHEP
Maximum Duration of Protection
11.03.2036
Owner
Exogenesis Corporation
20 Fortune Drive
Billerica, Massachusetts 01821
US
Representative
No representatives present
Inventor
KIRKPATRICK, Sean, R.
c/o Exogenesis Corporation 20 Fortune Drive
Billerica, Massachusetts 01821
US
SVRLUGA, Richard, C.
c/o Exogenesis Corporation 20 Fortune Drive
Billerica, Massachusetts 01821
US