Details for 2013153160

Up to date per 04.04.2026

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Title / Product Name

Niedrigenergieionenstrahlätzung

Status

Deleted

Protection Type

European Patent

(AT-) Application Number

2013153160

EP Publication Number

2624284

E-Number

802952

Language

PCT Number

Publication Date

07.08.2013 A

25.05.2016 B1

Registration Date

25.05.2016

AT Publication Date

15.06.2016

Application Date

30.01.2013

Registration Number

Priorities

31.01.2012

201261593281 P

17.12.2012

201213717272

IPC

H01L 21/311 20060101AFI20140307BHEP

Maximum Duration of Protection

30.01.2033

Owner

FEI Company5350 NE Dawson Creek Drive Hillsboro, OR 97124-5793US

Representative

No representatives present

Inventor

Rue, Mr. Chad21335 NW Rock Creek Blvd. Portland, OR 97229US