Details for 2015171838

Up to date per 01.04.2026

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Title / Product Name

BELICHTUNGSVORRICHTUNG, BELICHTUNGSVERFAHREN UND BAUELEMENTSHERSTELLUNGSVERFAHREN

Status

Deleted

Protection Type

European Patent

(AT-) Application Number

2015171838

EP Publication Number

2960927

E-Number

846630

Language

PCT Number

Publication Date

30.12.2015 A

16.11.2016 B1

Registration Date

16.11.2016

AT Publication Date

15.12.2016

Application Date

27.01.2005

Registration Number

Priorities

02.02.2004

2004025837

14.10.2004

2004300566

IPC

H01L 21/027 20060101AFI20160205BHEP

Maximum Duration of Protection

27.01.2025

Owner

Nikon Corporation15-3, Konan 2-chome Minato-ku Tokyo 108-6290JP

Representative

No representatives present

Inventor

Shibazaki, Yuichic/o NIKON CORPORATION Intellectual Property Division 15-3, Konan 2-chome Minato-ku Tokyo, 108-6290JP