Details for 2015765616
Up to date per 04.04.2026
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Details for 2015765616
Deleted
European Patent
25.01.2017 A
23.09.2020 B1
20.03.2014
US
201461955792 P
09.06.2014
US
201414300227
H01S 3/10 20060101AFI20170922BHEP
Owner
Kla-Tencor CorporationLegal Department One Technology Drive Milpitas, California 95035US
Representative
No representatives present
Inventor
DENG, Yujun1712 Fan Street San Jose, California 95131US
CHUANG, Yung-Ho Alex10734 South Stelling Road Cupertino, California 95014US
FIELDEN, John2020 Victoria Court Los Altos, California 94024US