Details for 2012739189

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Title / Product Name

ANTRIEBSSYSTEM UND ANTRIEBSVERFAHREN, BELICHTUNGSVORRICHTUNG UND BELICHTUNGSVERFAHREN SOWIE VERFAHREN ZUM ENTWURF DES ANTRIEBSSYSTEMS

Status

Deleted

Protection Type

European Patent

(AT-) Application Number

2012739189

EP Publication Number

2669931

E-Number

1258023

Language

PCT Number

JP12000548

Publication Date

04.12.2013 A

15.04.2020 B1

Registration Date

15.04.2020

AT Publication Date

15.05.2020

Application Date

27.01.2012

Registration Number

Priorities

28.01.2011

2011017265

IPC

G03F 7/20 20060101AFI20170712BHEP

Maximum Duration of Protection

27.01.2032

Owner

The University of Tokyo3-1, Hongo 7-chome Bunkyo-ku, Tokyo 113-8654JP

Nikon Corporation15-3, Konan 2-chome Minato-ku Tokyo 108-6290JP

Representative

No representatives present

Inventor

FUJIMOTO, Hiroshic/o THE UNIVERSITY OF TOKYO 3-1, Hongo 7-chome Bunkyo-ku Tokyo 113-8654JP

SAIKI, Kazuakic/o NIKON CORPORATION 12-1, Yurakucho 1-chome Chiyoda-ku Tokyo 100-8331JP

SAKATA, Koichic/o NIKON CORPORATION 12-1, Yurakucho 1-chome, Chiyoda-ku Tokyo 100-8331JP